发明授权
- 专利标题： Roll-to-roll processing method and tools for electroless deposition of thin layers
- 专利标题（中）： 卷对卷加工方法和薄层无电沉积工具
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申请号： US12581787申请日： 2009-10-19
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公开(公告)号： US08497152B2公开(公告)日： 2013-07-30
- 发明人: Jalal Ashjaee
- 申请人： Jalal Ashjaee
- 申请人地址： US CA San Jose
- 专利权人： SoloPower, Inc.
- 当前专利权人： SoloPower, Inc.
- 当前专利权人地址： US CA San Jose
- 代理机构： Pillsbury Winthrop Shaw Pittman LLP
- 主分类号： H01L51/40
- IPC分类号： H01L51/40
摘要：
A deposition method and a system are provided to deposit a CdS buffer layer on a surface of a solar cell absorber layer of a flexible workpiece from a process solution including all chemical components of the CdS buffer layer material. CdS is deposited from the deposition solution while the flexible workpiece is elastically shaped by a series of shaping rollers to retain the process solution on the solar cell absorber layer and while the flexible workpiece is heated by contacting to a heated liquid that the shaping rollers are fully or partially immersed. The flexible workpiece is elastically shaped by pulling a back surface of the flexible workpiece into surface cavity of the shaping rollers using magnetic force.
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