发明授权
US08497966B2 FFS type TFT-LCD array substrate and manufacturing method thereof
有权
FFS型TFT-LCD阵列基板及其制造方法
- 专利标题: FFS type TFT-LCD array substrate and manufacturing method thereof
- 专利标题(中): FFS型TFT-LCD阵列基板及其制造方法
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申请号: US12836028申请日: 2010-07-14
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公开(公告)号: US08497966B2公开(公告)日: 2013-07-30
- 发明人: Seungjin Choi , Youngsuk Song , Seongyeol Yoo
- 申请人: Seungjin Choi , Youngsuk Song , Seongyeol Yoo
- 申请人地址: CN Beijing
- 专利权人: Beijing Boe Optoelectronics Technology Co., Ltd.
- 当前专利权人: Beijing Boe Optoelectronics Technology Co., Ltd.
- 当前专利权人地址: CN Beijing
- 代理机构: Ladas & Parry LLP
- 优先权: CN200910089384 20090716
- 主分类号: G02F1/1343
- IPC分类号: G02F1/1343
摘要:
A manufacturing method for an FFS type TFT-LCD array substrate comprises: depositing a first metal film on a transparent substrate, and form a gate line, a gate electrode and a common electrode line by a first patterning process; depositing a gate insulating layer, an active layer film and a second metal film sequentially and patterning the second metal film and the active layer film by a second patterning process; Step 3 depositing a first transparent conductive film and patterning the first transparent conductive film, the second metal film and the active layer film by a third patterning process; depositing a passivation layer, forming a connection hole by patterning the passivation layer through the fourth patterning process, performing an ashing process on photoresist used in the fourth patterning process, depositing a second transparent conductive layer on the remaining photoresist, and forming a common electrode by a lifting-off process.
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