发明授权
US08499813B2 System for separating a diced semiconductor die from a die attach tape 有权
用于将切割的半导体管芯与管芯附接带分离的系统

System for separating a diced semiconductor die from a die attach tape
摘要:
A system is disclosed for ejecting a semiconductor die from a tape to which the die is affixed during the wafer dicing process. In embodiments, the system includes an ejector tool including a support table, ejector pins and a pick-up arm. The support table is connected to a vacuum source for creating a negative pressure at an interface between the tape and support table. The support table further includes an aperture with one or more chamfered sidewalls. The vacuum source is connected to the aperture so that, upon placement of the tape on the support table with a die centered over the aperture, the vacuum source pulls a portion of the tape around the edges of the semiconductor die away from the die and into the space created by the chamfered edges.
信息查询
0/0