Invention Grant
US08500382B2 Airflow management for particle abatement in semiconductor manufacturing equipment 有权
半导体制造设备中颗粒减少的气流管理

Airflow management for particle abatement in semiconductor manufacturing equipment
Abstract:
An airflow management system and/or method used in particle abatement in semiconductor manufacturing equipment. In particular, the apparatus disclosed is capable of creating and managing a carefully controlled particle free environment for the handling of semiconductor wafers or similar articles. The apparatus is particularly suited to be used as an interface between an equipment front end module (EFEM) and a vacuum loadlock chamber or other such article of process equipment. The apparatus also enables relative motion between enclosures while maintaining a particle free environment utilizing a moving air diffuser mounted to an interface panel.
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