- 专利标题: Semiconductor cells, arrays, devices and systems having a buried conductive line and methods for forming the same
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申请号: US13610513申请日: 2012-09-11
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公开(公告)号: US08501559B2公开(公告)日: 2013-08-06
- 发明人: Sanh D. Tang , John K. Zahurak
- 申请人: Sanh D. Tang , John K. Zahurak
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 代理机构: Wells St. John, P.S.
- 主分类号: H01L21/8234
- IPC分类号: H01L21/8234
摘要:
Semiconductor arrays including a plurality of access devices disposed on a buried conductive line and methods for forming the same are provided. The access devices each include a transistor having a source region and drain region spaced apart by a channel region of opposite dopant type and an access line associated with the transistor. The access line may be electrically coupled with one or more of the transistors and may be operably coupled to a voltage source. The access devices may be formed in an array on one or more conductive lines. A system may be formed by integrating the semiconductor devices with one or more memory semiconductor arrays or conventional logic devices, such as a complementary metal-oxide-semiconductor (CMOS) device.
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