Invention Grant
- Patent Title: Rapid thermal processing system and sulfidation method thereof
- Patent Title (中): 快速热处理系统及其硫化方法
-
Application No.: US13471410Application Date: 2012-05-14
-
Publication No.: US08507366B2Publication Date: 2013-08-13
- Inventor: Shih-Wei Lee , Ming-Hung Lin , Yao-Tsang Tsai
- Applicant: Shih-Wei Lee , Ming-Hung Lin , Yao-Tsang Tsai
- Applicant Address: TW Pingtung, Pingtung County
- Assignee: Axuntek Solar Energy
- Current Assignee: Axuntek Solar Energy
- Current Assignee Address: TW Pingtung, Pingtung County
- Agent Winston Hsu; Scott Margo
- Priority: TW100142510A 20111121
- Main IPC: H01L21/36
- IPC: H01L21/36 ; H01L21/20 ; H01L21/477

Abstract:
A rapid thermal processing system includes a rapid thermal processing furnace, a back electrode substrate, and a cover. The rapid thermal processing furnace includes a reaction chamber and a heating device. The heating device is capable of generating heat energy. The back electrode substrate is adapted to dispose in the reaction chamber and has a precursor layer and a selenium layer formed on the precursor layer. The cover is disposed at a position corresponding to the selenium layer on the back electrode substrate and has a sulfur in solid form formed thereon, so as to make the sulfur in solid form opposite to the selenium layer. After the sulfur in solid form absorbs the heat energy generated by the heating device, the sulfur in solid form reacts with the selenium layer and the precursor layer to form a photoelectric transducing layer.
Public/Granted literature
- US20130130432A1 RAPID THERMAL PROCESSING SYSTEM AND SULFIDATION METHOD THEREOF Public/Granted day:2013-05-23
Information query
IPC分类: