Invention Grant
US08507988B2 High voltage devices, systems, and methods for forming the high voltage devices
有权
用于形成高压器件的高压器件,系统和方法
- Patent Title: High voltage devices, systems, and methods for forming the high voltage devices
- Patent Title (中): 用于形成高压器件的高压器件,系统和方法
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Application No.: US12792055Application Date: 2010-06-02
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Publication No.: US08507988B2Publication Date: 2013-08-13
- Inventor: Chih-Wen Yao , Robert S. J. Pan , Ruey-Hsin Liu , Hsueh-Liang Chou , Puo-Yu Chiang , Chi-Chih Chen , Hsiao Chin Tuan
- Applicant: Chih-Wen Yao , Robert S. J. Pan , Ruey-Hsin Liu , Hsueh-Liang Chou , Puo-Yu Chiang , Chi-Chih Chen , Hsiao Chin Tuan
- Applicant Address: TW
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW
- Agency: Lowe Hauptman Ham & Berner, LLP
- Main IPC: H01L29/66
- IPC: H01L29/66

Abstract:
A high voltage (HV) device includes a gate dielectric structure over a substrate. The gate dielectric structure has a first portion and a second portion. The first portion has a first thickness and is over a first well region of a first dopant type in the substrate. The second portion has a second thickness and is over a second well region of a second dopant type. The first thickness is larger than the second thickness. A gate electrode is disposed over the gate dielectric structure. A metallic layer is over and coupled with the gate electrode. The metallic layer extends along a direction of a channel under the gate dielectric structure. At least one source/drain (S/D) region is disposed within the first well region of the first dopant type.
Public/Granted literature
- US20110079846A1 HIGH VOLTAGE DEVICES, SYSTEMS, AND METHODS FOR FORMING THE HIGH VOLTAGE DEVICES Public/Granted day:2011-04-07
Information query
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