Invention Grant
US08508735B2 Movable body apparatus, movable body drive method, exposure apparatus, exposure method, and device manufacturing method
有权
移动体装置，移动体驱动方法，曝光装置，曝光方法和装置制造方法
- Patent Title: Movable body apparatus, movable body drive method, exposure apparatus, exposure method, and device manufacturing method
- Patent Title (中): 移动体装置，移动体驱动方法，曝光装置，曝光方法和装置制造方法
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Application No.: US12561510Application Date: 2009-09-17
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Publication No.: US08508735B2Publication Date: 2013-08-13
- Inventor: Yuichi Shibazaki
- Applicant: Yuichi Shibazaki
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2009-122429 20090520
- Main IPC: G01B11/00
- IPC: G01B11/00
Abstract:
A drive system drives a movable body, based on measurement results of a first measurement system which measures the position of the movable body in an XY plane by irradiating a measurement beam from an arm member on a grating placed on a surface parallel to the XY plane of the movable body and measurement results of a second measurement system which measures a variance of the arm member using a laser interferometer. In this case, the drive system corrects measurement errors caused due to a variance of the arm member included in the measurement results of the first measurement system, using the measurement results of the second measurement system.
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