Invention Grant
- Patent Title: Methods and apparatus for tuning matching networks
- Patent Title (中): 调整匹配网络的方法和装置
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Application No.: US12899048Application Date: 2010-10-06
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Publication No.: US08513889B2Publication Date: 2013-08-20
- Inventor: Chunlei Zhang , Sergio F. Shoji , Andrey Semenin , Kartik Ramaswamy , James P. Cruse , Bryan Liao
- Applicant: Chunlei Zhang , Sergio F. Shoji , Andrey Semenin , Kartik Ramaswamy , James P. Cruse , Bryan Liao
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Agent Alan Taboada
- Main IPC: H03H7/38
- IPC: H03H7/38

Abstract:
Methods and apparatus for tuning matching networks are provided herein. A method of tuning a matching network includes providing a matching network coupling an RF source to a load, the matching network having a tunable element disposed at a first set point; increasing a value of the tunable element by a first step above the first set point; sensing a first adjusted value of a reflected RF power; decreasing the value of the tunable element by the first step below the first set point; sensing a second adjusted value of the reflected RF power; comparing the first and the second adjusted values of the reflected RF power; and moving the tunable element to a second set point that corresponds to a position having a lowest adjusted value of the reflected RF power. The method may be repeated until the reflected RF power falls within an acceptable reflected RF power range.
Public/Granted literature
- US20110162798A1 METHODS AND APPARATUS FOR TUNING MATCHING NETWORKS Public/Granted day:2011-07-07
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