发明授权
- 专利标题: Methods and apparatus for tuning matching networks
- 专利标题(中): 调整匹配网络的方法和装置
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申请号: US12899048申请日: 2010-10-06
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公开(公告)号: US08513889B2公开(公告)日: 2013-08-20
- 发明人: Chunlei Zhang , Sergio F. Shoji , Andrey Semenin , Kartik Ramaswamy , James P. Cruse , Bryan Liao
- 申请人: Chunlei Zhang , Sergio F. Shoji , Andrey Semenin , Kartik Ramaswamy , James P. Cruse , Bryan Liao
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Moser Taboada
- 代理商 Alan Taboada
- 主分类号: H03H7/38
- IPC分类号: H03H7/38
摘要:
Methods and apparatus for tuning matching networks are provided herein. A method of tuning a matching network includes providing a matching network coupling an RF source to a load, the matching network having a tunable element disposed at a first set point; increasing a value of the tunable element by a first step above the first set point; sensing a first adjusted value of a reflected RF power; decreasing the value of the tunable element by the first step below the first set point; sensing a second adjusted value of the reflected RF power; comparing the first and the second adjusted values of the reflected RF power; and moving the tunable element to a second set point that corresponds to a position having a lowest adjusted value of the reflected RF power. The method may be repeated until the reflected RF power falls within an acceptable reflected RF power range.
公开/授权文献
- US20110162798A1 METHODS AND APPARATUS FOR TUNING MATCHING NETWORKS 公开/授权日:2011-07-07
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