发明授权
- 专利标题: MEMS pressure sensor
- 专利标题(中): MEMS压力传感器
-
申请号: US13583379申请日: 2012-04-02
-
公开(公告)号: US08516905B2公开(公告)日: 2013-08-27
- 发明人: Kunihiko Nakamura , Tomohiro Iwasaki , Takehiko Yamakawa , Keiji Onishi
- 申请人: Kunihiko Nakamura , Tomohiro Iwasaki , Takehiko Yamakawa , Keiji Onishi
- 申请人地址: JP Osaka
- 专利权人: Panasonic Corporation
- 当前专利权人: Panasonic Corporation
- 当前专利权人地址: JP Osaka
- 代理机构: Wenderoth, Lind & Ponack, L.L.P.
- 国际申请: PCT/JP2012/002297 WO 20120402
- 国际公布: WO2012/140846 WO 20121018
- 主分类号: G01L1/10
- IPC分类号: G01L1/10 ; G01B7/16
摘要:
A MEMS resonator 100 including a substrate 112; an vibrator 102 including an mechanically vibrating part and a fixed part; at least one electrode 108 that is close to the vibrator and has an area overlapping with the vibrator across a gap 109 in a direction perpendicular to a surface of the substrate; and a pressure transferring mechanism to displace the at least one electrode according to an externally applied pressure so as to change the gap; is connected to a detection circuit that detects transmission characteristics of an AC signal from an input electrode to an output electrode, the input and output electrodes being one and the other of the vibrator 102 and the at least one electrode 108, and the pressure is detected based on the transmission characteristics of the AC signal that is detected by the detection circuit.
公开/授权文献
- US20130047746A1 MEMS PRESSURE SENSOR 公开/授权日:2013-02-28
信息查询