Invention Grant
US08517516B2 Flow-through liquid ejection using compliant membrane transducer 有权
使用柔性膜传感器的流通液体喷射

Flow-through liquid ejection using compliant membrane transducer
Abstract:
A method of ejecting a liquid includes providing a liquid dispenser including a substrate. A first portion of the substrate defines a liquid dispensing channel including an outlet opening. A second portion of the substrate defines a liquid supply channel and a liquid return channel. A diverter member is positioned on a wall of the liquid dispensing channel that includes the outlet opening. The diverter member includes a MEMS transducing member anchored to the wall of the liquid dispensing channel. A compliant membrane is positioned in contact with the MEMS transducing member. The diverter member is selectively actuated to divert a portion of the liquid flowing through the liquid dispensing channel through outlet opening of the liquid dispensing channel.
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