发明授权
US08518329B2 Incorporating CMOS integrated circuits in the design of affinity-based biosensor systems 有权
将CMOS集成电路结合在基于亲和性的生物传感器系统的设计中

Incorporating CMOS integrated circuits in the design of affinity-based biosensor systems
摘要:
A biosensor system incorporating CMOS integrated circuits. In one type of biosensor system, the biosensor system includes a silicon substrate. The biosensor system further includes active devices fabricated on the silicon substrate. Additionally, the biosensor system includes a plurality of metal layers stacked on top of the active devices. Furthermore, the biosensor system includes a passivation layer covering a top metal layer, where the passivation layer includes an opening configured to expose the top metal layer, where the opening is used as a sensing electrode. Additionally, the biosensor system includes a plurality of probes attached to the sensing electrode.
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