Invention Grant
- Patent Title: Modified design rules to improve device performance
- Patent Title (中): 改进设计规则以提高设备性能
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Application No.: US12879447Application Date: 2010-09-10
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Publication No.: US08519444B2Publication Date: 2013-08-27
- Inventor: Annie Lum , Derek C. Tao , Cheng Hung Lee , Chung-Ji Lu , Hong-Chen Cheng , Vineet Kumar Agrawal , Keun-Young Kim , Pyong Yun Cho
- Applicant: Annie Lum , Derek C. Tao , Cheng Hung Lee , Chung-Ji Lu , Hong-Chen Cheng , Vineet Kumar Agrawal , Keun-Young Kim , Pyong Yun Cho
- Applicant Address: TW
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW
- Agency: Lowe Hauptman & Ham, LLP
- Main IPC: H01L27/118
- IPC: H01L27/118

Abstract:
The layouts, device structures, and methods described above utilize dummy devices to extend the diffusion regions of edge structures and/or non-allowed structures to the dummy device. Such extension of diffusion regions resolves or reduces LOD and edge effect issues. In addition, treating the gate structure of a dummy device next to an edge device also allows only one dummy structure to be added next to the dummy device and saves the real estate on the semiconductor chip. The dummy devices are deactivated and their performance is not important. Therefore, utilizing dummy devices to extend the diffusion regions of edge structures and/or non-allowed structures according to design rules allows the resolution or reduction or LOD and edge effect issues without the penalty of yield reduction or increase in layout areas.
Public/Granted literature
- US20120061764A1 MODIFIED DESIGN RULES TO IMPROVE DEVICE PERFORMANCE Public/Granted day:2012-03-15
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