发明授权
- 专利标题: Solid-state image sensor and method of manufacturing the same
- 专利标题(中): 固态图像传感器及其制造方法
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申请号: US12845194申请日: 2010-07-28
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公开(公告)号: US08519499B2公开(公告)日: 2013-08-27
- 发明人: Mariko Saito , Ikuko Inoue , Takeshi Yoshida
- 申请人: Mariko Saito , Ikuko Inoue , Takeshi Yoshida
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2009-210917 20090911
- 主分类号: H01L29/00
- IPC分类号: H01L29/00
摘要:
According to one embodiment, a solid-state image sensor includes a semiconductor substrate including a first surface on which light enters, and a second surface opposite to the first surface, a pixel region formed in the semiconductor substrate, and including a photoelectric conversion element which converts the incident light into an electrical signal, a peripheral region formed in the semiconductor substrate, and including a circuit which controls an operation of the element in the pixel region, a plurality of interconnects which are formed in a plurality of interlayer insulating films stacked on the second surface, and are connected to the circuit, and a support substrate formed on the stacked interlayer insulating films and the interconnects. An uppermost one of the interconnects formed in an uppermost one of the interlayer insulating films is buried in a first trench formed in the uppermost interlayer insulating film.
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