发明授权
- 专利标题: Method of fabricating thin-film transistor substrate
- 专利标题(中): 制造薄膜晶体管基板的方法
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申请号: US13191833申请日: 2011-07-27
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公开(公告)号: US08524549B2公开(公告)日: 2013-09-03
- 发明人: Hyung-Jun Kim , Chang-Oh Jeong , Il-Yong Yoon
- 申请人: Hyung-Jun Kim , Chang-Oh Jeong , Il-Yong Yoon
- 申请人地址: KR Yongin
- 专利权人: Samsung Display Co., Ltd.
- 当前专利权人: Samsung Display Co., Ltd.
- 当前专利权人地址: KR Yongin
- 代理机构: H.C. Park & Associates, PLC
- 优先权: KR10-2010-0082566 20100825
- 主分类号: H01L21/268
- IPC分类号: H01L21/268
摘要:
A method of fabricating a thin-film transistor (TFT) substrate includes forming a gate electrode on a substrate; forming an insulating film on the gate electrode; forming an amorphous semiconductor pattern on the insulating film; and forming a source electrode separated from a drain electrode on the amorphous semiconductor pattern; forming a light-concentrating layer, which includes a protrusion, on the amorphous semiconductor pattern, the source electrode, and the drain electrode; and crystallizing at least part of the amorphous semiconductor pattern by irradiating light to the protrusion of the light-concentrating layer.
公开/授权文献
- US20120052638A1 METHOD OF FABRICATING THIN-FILM TRANSISTOR SUBSTRATE 公开/授权日:2012-03-01
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