Test cells are included in a one-time programmable (OTP) memory array for detecting semiconductor fabrication misalignment, which can result in a potentially defective memory array. The test cells are fabricated at the same time as the normal OTP cells, except they are smaller in size along one dimension in order to detect mask misalignment along that dimension. Any fabricated test cell which cannot be programmed indicates a level of fabrication mask misalignment has occurred and the OTP memory array should not be used.