Invention Grant
- Patent Title: Middle layer of die structure that comprises a cavity that holds an alkali metal
- Patent Title (中): 包含保持碱金属的空腔的模具结构的中间层
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Application No.: US13068608Application Date: 2011-05-16
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Publication No.: US08530249B2Publication Date: 2013-09-10
- Inventor: Henry C. Abbink , William P. Debley , Christine E. Geosling , Daryl K. Sakaida , Robert E. Stewart
- Applicant: Henry C. Abbink , William P. Debley , Christine E. Geosling , Daryl K. Sakaida , Robert E. Stewart
- Applicant Address: US VA Falls Church
- Assignee: Northrop Grumman Systems Corporation
- Current Assignee: Northrop Grumman Systems Corporation
- Current Assignee Address: US VA Falls Church
- Agency: Carmen Patti Law Group, LLC
- Main IPC: H01L21/00
- IPC: H01L21/00
Abstract:
In one implementation, a chamber is selected that accommodates an array of die structures that comprises one or more cavities. An inner chamber of the chamber is maintained at a first temperature. An alkali metal source of the chamber is maintained at a second temperature greater than the first temperature. An outer chamber of the chamber is maintained at a third temperature greater than the first temperature and the second temperature. The one or more cavities of the array of die structures are filled with a portion of the alkali metal source. The one or more cavities of the array of die structures are sealed to comprise the portion of the alkali metal source.
Public/Granted literature
- US20110219729A1 Middle layer of die structure that comprises a cavity that holds an alkali metal Public/Granted day:2011-09-15
Information query
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