发明授权
- 专利标题: Electron beam scanner
- 专利标题(中): 电子束扫描仪
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申请号: US12564611申请日: 2009-09-22
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公开(公告)号: US08530849B2公开(公告)日: 2013-09-10
- 发明人: Douglas Perry Boyd , Samuel Moon-Ho Song
- 申请人: Douglas Perry Boyd , Samuel Moon-Ho Song
- 申请人地址: US NV Las Vegas
- 专利权人: Telesecurity Sciences, Inc.
- 当前专利权人: Telesecurity Sciences, Inc.
- 当前专利权人地址: US NV Las Vegas
- 代理机构: The Small Patent Law Group LLC
- 代理商 Dean Small
- 主分类号: H01L27/146
- IPC分类号: H01L27/146
摘要:
An electron beam scanner includes a stationary source producing an electron beam and a detector positioned to partially circumscribe a scan field, the detector divided into a pair of detector rings arranged adjacent to one another and separated by a gap extending at least partially about a circumference of the detector. The electron beam scanner also includes a target arranged concentric with the detector and located opposite the detector across the scan field, the target having end portions circumferentially overlapping the detector and radially aligned with the gap between the detector rings, such that when the electron beam impinges on the target the target transmits radiation through the gap across the scan field to an associated section of the detector.
公开/授权文献
- US20100072384A1 ELECTRON BEAM SCANNER 公开/授权日:2010-03-25
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