Invention Grant
US08530858B2 Transmission electron microscope apparatus comprising electron spectroscope, sample holder, sample stage, and method for acquiring spectral image
有权
透射电子显微镜装置,包括电子分光镜,样品架,样品台,以及光谱图像获取方法
- Patent Title: Transmission electron microscope apparatus comprising electron spectroscope, sample holder, sample stage, and method for acquiring spectral image
- Patent Title (中): 透射电子显微镜装置,包括电子分光镜,样品架,样品台,以及光谱图像获取方法
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Application No.: US13000593Application Date: 2009-06-11
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Publication No.: US08530858B2Publication Date: 2013-09-10
- Inventor: Shohei Terada , Yoshifumi Taniguchi
- Applicant: Shohei Terada , Yoshifumi Taniguchi
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: McDermott Will & Emery LLP
- Priority: JP2008-168044 20080627
- International Application: PCT/JP2009/061062 WO 20090611
- International Announcement: WO2009/157358 WO 20091230
- Main IPC: H01J37/26
- IPC: H01J37/26

Abstract:
A transmission electron microscope apparatus, a sample holder and a sample stage and a method for acquiring spectral images as well are provided which can acquire spectral images at a time from a plurality of samples and measure highly accurate chemical shifts from electron energy loss spectra extracted from the spectral images. A transmission electron microscope apparatus comprises an electron gun for emitting an electron beam, a condenser lens for converging the emitted electron beam, a plurality of sample stages radiated with a converged electron beam and adapted to mount samples, a sample movement control unit for moving the sample stages, image-forming lenses for forming an image of an electron beam having transmitted through the plural samples, an electron spectrometer adapted to perform spectrometry of the electron beam in accordance with energy amounts the image-formed electron beam has and deliver spectral images obtained at convergence positions which are different in energy dispersion axis direction and in a direction orthogonal to the energy dispersion axis direction to thereby acquire spectral images from the plural samples at a time, and an image display unit for displaying acquired spectral images.
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