Invention Grant
- Patent Title: Probe card test apparatus and method
- Patent Title (中): 探针卡测试仪和方法
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Application No.: US12682391Application Date: 2008-10-10
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Publication No.: US08531202B2Publication Date: 2013-09-10
- Inventor: Sammy Mok , Frank Swiatowiec , Fariborz Agahdel
- Applicant: Sammy Mok , Frank Swiatowiec , Fariborz Agahdel
- Applicant Address: US CA San Jose
- Assignee: VeraConnex, LLC
- Current Assignee: VeraConnex, LLC
- Current Assignee Address: US CA San Jose
- Agent David T. Millers
- International Application: PCT/US2008/011667 WO 20081010
- International Announcement: WO2009/048618 WO 20090416
- Main IPC: G01R31/26
- IPC: G01R31/26

Abstract:
A probe card analyzer mounts on a probe card in a wafer prober and a use a fixture in the wafer probe and switch electronics in place of an ATE head. Methods of testing can confirm that probe cards are operating within their specifications over large temperature ranges and the mechanical force ranges seen in real manufacturing environments. This reduces the cost and improves the accuracy and speed of analyzing probe cards and improves diagnosing problems with probe cards.
Public/Granted literature
- US20100213960A1 Probe Card Test Apparatus And Method Public/Granted day:2010-08-26
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