发明授权
- 专利标题: Physical quantity sensor and physical quantity measuring method
- 专利标题(中): 物理量传感器和物理量测量方法
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申请号: US12724567申请日: 2010-03-16
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公开(公告)号: US08537341B2公开(公告)日: 2013-09-17
- 发明人: Tatsuya Ueno
- 申请人: Tatsuya Ueno
- 申请人地址: JP Tokyo
- 专利权人: Azbil Corporation
- 当前专利权人: Azbil Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Drinker Biddle & Reath LLP
- 主分类号: G01C3/08
- IPC分类号: G01C3/08
摘要:
A physical quantity sensor includes: a semiconductor laser which emits laser light to a measurement target; an oscillation wavelength modulating device that operates the semiconductor laser such that at least one of a first oscillation period and a second oscillation period alternately exists; a detector that detects an electrical signal including interference waveforms, the interference waveforms being caused by a self-coupling effect of the laser light and return light from the measurement target; a signal extracting device that measures each cycle of the interference waveforms whenever the interference waveform is input; a cycle correcting device that compares each cycle of the interference waveforms with a reference cycle to correct the cycles of the interference waveforms; and a calculating device that calculates at least one of displacement and velocity of the measurement target based on each of the cycles of the interference waveforms corrected by the cycle correcting device.
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