发明授权
US08537874B2 High fill-factor efficient vertical-cavity surface emitting laser arrays
有权
高填充因子效率垂直腔表面发射激光器阵列
- 专利标题: High fill-factor efficient vertical-cavity surface emitting laser arrays
- 专利标题(中): 高填充因子效率垂直腔表面发射激光器阵列
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申请号: US12914146申请日: 2010-10-28
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公开(公告)号: US08537874B2公开(公告)日: 2013-09-17
- 发明人: Chad Wang , Jonathan Geske
- 申请人: Chad Wang , Jonathan Geske
- 申请人地址: US OR Wilsonville
- 专利权人: Flir Systems, Inc.
- 当前专利权人: Flir Systems, Inc.
- 当前专利权人地址: US OR Wilsonville
- 代理机构: Haynes and Boone, LLP
- 主分类号: H01S3/08
- IPC分类号: H01S3/08
摘要:
An array of vertical-cavity surface emitting lasers (VCSELs) may be fabricated with very high fill-factors, thereby enabling very high output power densities during pulse, quasi-continuous wave (QCW), and continuous wave (CW) operation. This high fill-factor is achieved using asymmetrical pillars in a rectangular packing scheme as opposed prior art pillar shapes and packing schemes. The use of asymmetrical pillars maintains high efficiency operation of VCSELs by maintaining minimal current injection distance from the metal contacts to the laser active region and by maintaining efficient waste heat extraction from the VCSEL. This packing scheme for very high fill-factor VCSEL arrays is directly applicable for next generation high-power, substrate removed, VCSEL arrays.
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