发明授权
- 专利标题: Methods for constructing an optimal endpoint algorithm
- 专利标题(中): 构建最优端点算法的方法
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申请号: US12826564申请日: 2010-06-29
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公开(公告)号: US08538572B2公开(公告)日: 2013-09-17
- 发明人: Jiangxin Wang , Andrew James Perry , Vijayakumar C Venugopal
- 申请人: Jiangxin Wang , Andrew James Perry , Vijayakumar C Venugopal
- 申请人地址: US CA Fremont
- 专利权人: Lam Research Corporation
- 当前专利权人: Lam Research Corporation
- 当前专利权人地址: US CA Fremont
- 代理机构: IPSG, P.C. Intellectual Property Law
- 主分类号: G06F19/00
- IPC分类号: G06F19/00 ; G05B13/02 ; H01L21/00 ; G06F15/00
摘要:
A method for automatically identifying an optimal endpoint algorithm for qualifying a process endpoint during substrate processing within a plasma processing system is provided. The method includes receiving sensor data from a plurality of sensors during substrate processing of at least one substrate within the plasma processing system, wherein the sensor data includes a plurality of signal streams from a plurality of sensor channels. The method also includes identifying an endpoint domain, wherein the endpoint domain is an approximate period within which the process endpoint is expected to occur. The method further includes analyzing the sensor data to generate a set of potential endpoint signatures. The method yet also includes converting the set of potential endpoint signatures into a set of optimal endpoint algorithms. The method yet further includes importing one optimal endpoint algorithm of the set of optimal endpoint algorithms into production environment.
公开/授权文献
- US20100330710A1 METHODS FOR CONSTRUCTING AN OPTIMAL ENDPOINT ALGORITHM 公开/授权日:2010-12-30
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