Invention Grant
US08541326B2 Optical member for deep ultraviolet and process for producing same
有权
用于深紫外线的光学元件及其制造方法
- Patent Title: Optical member for deep ultraviolet and process for producing same
- Patent Title (中): 用于深紫外线的光学元件及其制造方法
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Application No.: US13459624Application Date: 2012-04-30
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Publication No.: US08541326B2Publication Date: 2013-09-24
- Inventor: Ryusuke Morita , Takuya Nakagawa , Kei Iwata , Masaaki Takata
- Applicant: Ryusuke Morita , Takuya Nakagawa , Kei Iwata , Masaaki Takata
- Applicant Address: JP Tokyo
- Assignee: Asahi Glass Company, Limited
- Current Assignee: Asahi Glass Company, Limited
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2009-250195 20091030
- Main IPC: C03C3/06
- IPC: C03C3/06 ; C03B19/06 ; C03B19/00
Abstract:
The present invention relates to an optical member for deep ultraviolet having a wavelength of 250 nm or shorter, containing a synthetic silica glass which does not substantially contain a halogen element, has a maximum OH group content of less than 10 ppm by weight, has contents of ODC (oxygen deficient centers) and E-prime center of each less than 1×1014 cm−3, does not substantially contain SiH and peroxy linkage, and has a fictive temperature of 1,050° C. or lower.
Public/Granted literature
- US20120213685A1 OPTICAL MEMBER FOR DEEP ULTRAVIOLET AND PROCESS FOR PRODUCING SAME Public/Granted day:2012-08-23
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