- 专利标题: Noise shielding techniques for ultra low current measurements in biochemical applications
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申请号: US13396522申请日: 2012-02-14
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公开(公告)号: US08541849B2公开(公告)日: 2013-09-24
- 发明人: Roger Chen
- 申请人: Roger Chen
- 申请人地址: US CA Mountain View
- 专利权人: Genia Technologies, Inc.
- 当前专利权人: Genia Technologies, Inc.
- 当前专利权人地址: US CA Mountain View
- 代理机构: Van Pelt, Yi & James LLP
- 主分类号: H01L27/14
- IPC分类号: H01L27/14
摘要:
A device having an integrated noise shield is disclosed. The device includes a plurality of vertical shielding structures substantially surrounding a semiconductor device. The device further includes an opening above the semiconductor device substantially filled with a conductive fluid, wherein the plurality of vertical shielding structures and the conductive fluid shield the semiconductor device from ambient radiation. In some embodiments, the device further includes a conductive bottom shield below the semiconductor device shielding the semiconductor device from ambient radiation. In some embodiments, the opening is configured to allow a biological sample to be introduced into the semiconductor device. In some embodiments, the vertical shielding structures comprise a plurality of vias, wherein each of the plurality of vias connects more than one conductive layers together. In some embodiments, the device comprises a nanopore device, and wherein the nanopore device comprises a single cell of a nanopore array.
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