Invention Grant
- Patent Title: Infrared detection device
- Patent Title (中): 红外线检测装置
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Application No.: US13069610Application Date: 2011-03-23
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Publication No.: US08541861B2Publication Date: 2013-09-24
- Inventor: Masaki Atsuta , Hideyuki Funaki , Keita Sasaki
- Applicant: Masaki Atsuta , Hideyuki Funaki , Keita Sasaki
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Turocy & Watson, LLP
- Priority: JP2010-204798 20100913
- Main IPC: H01L31/058
- IPC: H01L31/058

Abstract:
According to one embodiment, an infrared detection device includes a detection element. The detection element includes a semiconductor substrate, a signal interconnect section, a detection cell and a support section. The semiconductor substrate is provided with a cavity on a surface of the semiconductor substrate. The signal interconnect section is provided in a region surrounding the cavity of the semiconductor substrate. The detection cell spaced from the semiconductor substrate above the cavity includes a thermoelectric conversion layer, and an absorption layer. The absorption layer is laminated with the thermoelectric conversion layer, and provided with a plurality of holes each having a shape whose upper portion is widened. The support section holds the detection cell above the cavity and connects the signal interconnect section and the detection cell.
Public/Granted literature
- US20120061791A1 INFRARED DETECTION DEVICE Public/Granted day:2012-03-15
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