发明授权
US08542436B2 Optical fiber amplifier, light source device, exposure device, object inspection device, and treatment device
有权
光纤放大器,光源装置,曝光装置,物体检查装置及处理装置
- 专利标题: Optical fiber amplifier, light source device, exposure device, object inspection device, and treatment device
- 专利标题(中): 光纤放大器,光源装置,曝光装置,物体检查装置及处理装置
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申请号: US13487843申请日: 2012-06-04
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公开(公告)号: US08542436B2公开(公告)日: 2013-09-24
- 发明人: Akira Tokuhisa
- 申请人: Akira Tokuhisa
- 申请人地址: JP Tokyo
- 专利权人: Nikon Corporation
- 当前专利权人: Nikon Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Oliff & Berridge, PLC
- 优先权: JP2006-197547 20060720
- 主分类号: H01S3/00
- IPC分类号: H01S3/00
摘要:
A polarization state adjusting optical element is formed by a ½ wavelength plate and a ¼ wavelength plate and its polarization direction and elliptic degree are adjusted. By adjusting the polarization state adjusting optical element in advance, even if the output of a pump light source is changed, the polarization characteristic (polarization direction and elliptic degree) of the output light of an FDFA amplifier will not change or the change is sufficiently small. In this state, a polarization state adjusting optical element adjusts the polarization state of the laser beam coming into a wavelength conversion optical system so that the wavelength conversion optical system has the maximum conversion efficiency. Thus, it is possible to provide an FDFA having a small change of the polarization state of the output light even if the pump light intensity is changed.
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