发明授权
US08542957B2 Optical waveguide sensor and manufacturing method of the same 失效
光波导传感器及其制造方法相同

Optical waveguide sensor and manufacturing method of the same
摘要:
An optical waveguide sensor includes a substrate and an optical waveguide. The optical waveguide includes a core and a lateral clad. The core extends in a spiral shape above a surface of the substrate. The lateral clad is disposed in a same layer as the core above the surface of the substrate and is in contact with either side surfaces of the core. At least a part of a surface of the core located opposite from the substrate is a transmission surface from which light leaks and is absorbed by a detected object.
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