发明授权
US08544651B2 Wafer transfer pod for reducing wafer particulate contamination 有权
用于减少晶圆颗粒污染的晶圆转运荚

Wafer transfer pod for reducing wafer particulate contamination
摘要:
A wafer transport pod for storing or transporting semiconductor wafers during semiconductor wafer processing includes a body having a top panel, a bottom panel, a back panel, two side panels and a front panel. The two side panels are configured for receiving the semiconductor wafers therebetween. The two side panels have a plurality of separately hermetically sealed partitions inside the body, any two of the sealed partitions for sealing a wafer therebetween and for preventing wafer contamination. The front panel provides ingress and egress for the semiconductor wafers to and from the wafer transport pod.
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