发明授权
- 专利标题: Wafer transfer pod for reducing wafer particulate contamination
- 专利标题(中): 用于减少晶圆颗粒污染的晶圆转运荚
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申请号: US13354969申请日: 2012-01-20
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公开(公告)号: US08544651B2公开(公告)日: 2013-10-01
- 发明人: Ying Zhang , Tien-Chih Cheng , Shu-Huei Suen , Yu-Cheng Liu , Jian-Huah Chiou
- 申请人: Ying Zhang , Tien-Chih Cheng , Shu-Huei Suen , Yu-Cheng Liu , Jian-Huah Chiou
- 申请人地址: TW
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW
- 代理机构: Lowe Hauptman & Ham, LLP
- 主分类号: B65D81/02
- IPC分类号: B65D81/02 ; B65D81/18
摘要:
A wafer transport pod for storing or transporting semiconductor wafers during semiconductor wafer processing includes a body having a top panel, a bottom panel, a back panel, two side panels and a front panel. The two side panels are configured for receiving the semiconductor wafers therebetween. The two side panels have a plurality of separately hermetically sealed partitions inside the body, any two of the sealed partitions for sealing a wafer therebetween and for preventing wafer contamination. The front panel provides ingress and egress for the semiconductor wafers to and from the wafer transport pod.
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