Invention Grant
US08545159B2 Apparatus having conveyor and method of transferring substrate using the same
有权
具有传送带和使用其传送基板的方法的设备
- Patent Title: Apparatus having conveyor and method of transferring substrate using the same
- Patent Title (中): 具有传送带和使用其传送基板的方法的设备
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Application No.: US10956389Application Date: 2004-10-01
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Publication No.: US08545159B2Publication Date: 2013-10-01
- Inventor: Chul-Joo Hwang , Yong-Jin Kim
- Applicant: Chul-Joo Hwang , Yong-Jin Kim
- Applicant Address: KR
- Assignee: Jusung Engineering Co., Ltd.
- Current Assignee: Jusung Engineering Co., Ltd.
- Current Assignee Address: KR
- Priority: KR10-2003-0068347 20031001; KR10-2004-0077541 20040925
- Main IPC: B65G49/07
- IPC: B65G49/07 ; H01L21/677
Abstract:
An apparatus for a liquid crystal display device includes: a process chamber for treating a substrate; a load-lock chamber having an interior conveyor; and a transfer chamber connected to the process chamber and the at least one load-lock chamber, the transfer chamber having a substrate-transferring means.
Public/Granted literature
- US20050074312A1 Apparatus having conveyor and method of transferring substrate using the same Public/Granted day:2005-04-07
Information query
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