发明授权
- 专利标题: Polishing pad, manufacturing method thereof and polishing method
- 专利标题(中): 抛光垫,其制造方法和抛光方法
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申请号: US13379588申请日: 2010-06-22
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公开(公告)号: US08545291B2公开(公告)日: 2013-10-01
- 发明人: Kohki Itoyama , Daisuke Takahashi , Junichi Ueno , Syuichi Kobayashi
- 申请人: Kohki Itoyama , Daisuke Takahashi , Junichi Ueno , Syuichi Kobayashi
- 申请人地址: JP Chuo-Ku, Tokyo JP Chiyoda-Ku, Tokyo
- 专利权人: Fujibo Holdings Inc.,Shin-Etsu Handotai Co., Ltd.
- 当前专利权人: Fujibo Holdings Inc.,Shin-Etsu Handotai Co., Ltd.
- 当前专利权人地址: JP Chuo-Ku, Tokyo JP Chiyoda-Ku, Tokyo
- 代理机构: Buchanan Ingersoll & Rooney PC
- 优先权: JP2009-149190 20090623
- 国际申请: PCT/JP2010/060521 WO 20100622
- 国际公布: WO2010/150766 WO 20101229
- 主分类号: B24B37/04
- IPC分类号: B24B37/04
摘要:
A polishing pad capable of improving an affinity to polishing liquid and stabilizing polishing performance is provided. A polishing pad 10 is equipped with a urethane sheet 2. The urethane sheet 2 has a polishing surface P for polishing an object to be polished. The urethane sheet 2 is formed by a dry molding method and is formed by slicing a polyurethane foamed body which is obtained by reacting and curing mixed liquid in which an isocyanate-group containing compound, water, a foam control agent and a polyamine compound are mixed. Foams 3 are dispersed approximately uniformly inside the urethane sheet 2. Opened pores 4 which are opened parts of the foams 3 are formed at the polishing surface P. Inside the urethane sheet 2, the foams 3 formed adjacently to each other are communicated by communication holes 9, and the communication holes 9 are formed at a ratio of 800 holes/cm2 or more when observed from a side of the polishing surface P. Polishing liquid moves via the communication holes 9 and the foams 3.
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