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US08546176B2 Forming chalcogenide semiconductor absorbers 有权
形成硫族化物半导体吸收剂

Forming chalcogenide semiconductor absorbers
Abstract:
Sulfur-containing chalcogenide absorbers in thin film solar cell are manufactured by sequential sputtering or co-sputtering targets, one of which contains a sulfur compound, onto a substrate and then annealing the substrate. The anneal is performed in a non-sulfur containing environment and avoids the use of hazardous hydrogen sulfide gas. A sulfurized chalcogenide is formed having a sulfur concentration gradient.
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