发明授权
- 专利标题： MEMS devices
- 专利标题（中）： MEMS器件
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申请号： US13203624申请日： 2010-03-04
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公开(公告)号： US08546712B2公开(公告)日： 2013-10-01
- 发明人: Martijn Goossens , Hilco Suy , Peter Gerard Steeneken , Jozef Thomas Martinus van Beek
- 申请人： Martijn Goossens , Hilco Suy , Peter Gerard Steeneken , Jozef Thomas Martinus van Beek
- 申请人地址： NL Eindhoven
- 专利权人： NXP B.V.
- 当前专利权人： NXP B.V.
- 当前专利权人地址： NL Eindhoven
- 优先权： EP09100162 20090304
- 国际申请： PCT/IB2010/050939 WO 20100304
- 国际公布： WO2010/100622 WO 20100910
- 主分类号： H01H57/00
- IPC分类号： H01H57/00
摘要：
A MEMS device comprises first and second opposing electrode arrangements (22,28), wherein the second electrode arrangement (28) is electrically movable to vary the electrode spacing between facing sides of the first and second electrode arrangements. At least one of the facing sides has a non-flat surface with at least one peak and at least one trough. The height of the peak and depth of the trough is between 0.01t and 0.1t where t is the thickness of the movable electrode.
公开/授权文献
- US20120043188A1 MEMS DEVICES 公开/授权日：2012-02-23
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