Invention Grant
US08549458B2 Method, system, and program product for routing an integrated circuit to be manufactured by sidewall-image transfer 有权
用于路由要通过侧壁图像传送制造的集成电路的方法,系统和程序产品

Method, system, and program product for routing an integrated circuit to be manufactured by sidewall-image transfer
Abstract:
Disclosed is a method, apparatus, and program product for routing an electronic design using sidewall image transfer that is correct by construction. The layout is routed by construction to allow successful manufacturing with sidewall image transfer, since the router will not allow a routing configuration in the layout that cannot be successfully manufactured with a two-mask sidewall image transfer. A layout is produced that can be manufactured by a two-mask sidewall image transfer method. In one approach, interconnections can be in arbitrary directions. In another approach, interconnections follow grid lines in x and y-directions.
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