发明授权
- 专利标题： Imprint apparatus and method
- 专利标题（中）： 印刷装置和方法
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申请号： US13230554申请日： 2011-09-12
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公开(公告)号： US08550801B2公开(公告)日： 2013-10-08
- 发明人: Yohko Furutono , Shinji Mikami , Masayuki Hatano , Tetsuro Nakasugi
- 申请人： Yohko Furutono , Shinji Mikami , Masayuki Hatano , Tetsuro Nakasugi
- 申请人地址： JP Tokyo
- 专利权人： Kabushiki Kaisha Toshiba
- 当前专利权人： Kabushiki Kaisha Toshiba
- 当前专利权人地址： JP Tokyo
- 代理机构： Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- 优先权： JP2010-204608 20100913
- 主分类号： B29C59/02
- IPC分类号： B29C59/02
摘要：
In one embodiment, an imprint apparatus includes a template holding part configured to hold a template for imprint. The apparatus further includes a template moving part configured to move the template to press the template onto a light curing resin on a transfer target substrate or to demold the template from the light curing resin. The apparatus further includes a light source configured to irradiate the light curing resin with light to cure the light curing resin. The apparatus further includes a demold control part configured to control a demold speed or a demold angle of the template, based on a position of a shot region from which the template is to be demolded, when demolding the template from the light curing resin.
公开/授权文献
- US20120061882A1 IMPRINT APPARATUS AND METHOD 公开/授权日：2012-03-15
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