发明授权
- 专利标题: Method for fabricating semiconductor laser
- 专利标题(中): 制造半导体激光器的方法
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申请号: US13597305申请日: 2012-08-29
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公开(公告)号: US08551797B2公开(公告)日: 2013-10-08
- 发明人: Shinji Abe
- 申请人: Shinji Abe
- 申请人地址: JP Tokyo
- 专利权人: Mitsubishi Electric Corporation
- 当前专利权人: Mitsubishi Electric Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Leydig, Voit & Mayer, Ltd.
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A method for fabricating a semiconductor laser includes: sequentially forming a cladding layer of a first conductivity type, an active layer, a cladding layer of a second conductivity type, and a contact layer of the second conductivity type on a semiconductor substrate; forming a promotion film which contacts the contact layer only in a window region proximate an end plane of the semiconductor laser and absorbs group-III atoms from the contact layer to promote generation of group-III vacancies; implanting ions into the contact layer in the window region to damage the contact layer in the window region; and after forming the promotion film and implanting the ions, heat treating so that the group-III vacancies are diffused and the active layer is disordered in the window region and forms a window structure.
公开/授权文献
- US20130217157A1 METHOD FOR FABRICATING SEMICONDUCTOR LASER 公开/授权日:2013-08-22
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