The disclosed invention provides a structure and method for easily measuring capacitive and/or resistive components of a sensor system. In one embodiment, the structure comprises a signal generator configured to output a load current to a measurement element containing measurement sensor elements and a parasitic capacitance. A controllable excitation voltage is generated, via integration of the load current on the parasitic capacitance, and output to the measurement sensor elements having capacitive and resistive components. The controlled voltage through the measurement device may be manipulated to cause the capacitive and resistive components to exhibit a transient effect. The resulting output current, provided from the measurement device therefore has transient response characteristics (e.g., the settling time, amplitude) that can be selectively measured by a measurement circuit to easily determine values of the capacitive and resistive measurement elements. Furthermore, dedicated demodulation techniques may be used to measure the capacitive and resistive components.