发明授权
US08552502B2 Structure and method to make replacement metal gate and contact metal
有权
用于替换金属栅极和接触金属的结构和方法
- 专利标题: Structure and method to make replacement metal gate and contact metal
- 专利标题(中): 用于替换金属栅极和接触金属的结构和方法
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申请号: US13427963申请日: 2012-03-23
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公开(公告)号: US08552502B2公开(公告)日: 2013-10-08
- 发明人: Zhengwen Li , Michael P. Chudzik , Unoh Kwon , Filippos Papadatos , Andrew H. Simon , Keith Kwong Hon Wong
- 申请人: Zhengwen Li , Michael P. Chudzik , Unoh Kwon , Filippos Papadatos , Andrew H. Simon , Keith Kwong Hon Wong
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Scully, Scott, Murphy & Presser, P.C.
- 代理商 H. Daniel Schnurmann
- 主分类号: H01L27/12
- IPC分类号: H01L27/12
摘要:
An electrical device is provided that in one embodiment includes a p-type semiconductor device having a first gate structure that includes a gate dielectric that is present on the semiconductor substrate, a p-type work function metal layer, a metal layer composed of titanium and aluminum, and a metal fill composed of aluminum. An n-type semiconductor device is also present on the semiconductor substrate that includes a second gate structure that includes a gate dielectric, a metal layer composed of titanium and aluminum, and a metal fill composed of aluminum. An interlevel dielectric is present over the semiconductor substrate. The interlevel dielectric includes interconnects to the source and drain regions of the p-type and n-type semiconductor devices. The interconnects are composed of a metal layer composed of titanium and aluminum, and a metal fill composed of aluminum. The present disclosure also provides a method of forming the aforementioned structure.
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