Disclosed herein is a camera module having a MEMS actuator and a driving method thereof, the camera module with a MEMS actuator, including, a MEMS actuator moving a lens with electrostatic force, for focus adjustment, an electrostatic capacity measurement unit measuring electrostatic capacity produced in the MEMS actuator, a foreign substance determination unit determining if foreign substances exist in the MEMS actuator, and outputting a trigger signal when a foreign substance exists, and a MEMS actuator drive unit driving the MEMS actuator to a reiterated vibration using the trigger signal outputted from the foreign substance determination unit.