发明授权
- 专利标题： Template having a varying thickness to facilitate expelling a gas positioned between a substrate and the template
- 专利标题（中）： 模板具有不同的厚度以便于排出位于基板和模板之间的气体
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申请号： US13073533申请日： 2011-03-28
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公开(公告)号： US08556616B2公开(公告)日： 2013-10-15
- 发明人: Douglas J. Resnick , Mario Johannes Meissl , Byung-Jin Choi , Sidlgata V. Sreenivasan
- 申请人： Douglas J. Resnick , Mario Johannes Meissl , Byung-Jin Choi , Sidlgata V. Sreenivasan
- 申请人地址： US TX Austin
- 专利权人： Molecular Imprints, Inc.
- 当前专利权人： Molecular Imprints, Inc.
- 当前专利权人地址： US TX Austin
- 代理商 Cameron A. King
- 主分类号： B29C59/02
- IPC分类号： B29C59/02
摘要：
A nanoimprint lithography template including, inter alia, a body having first and second opposed sides with a first surface disposed on the first side, the second side having a recess disposed therein, the body having first and second regions with the second region surrounding the first region and the recess in superimposition with the first region, with a portion of the first surface in superimposition with the first region being spaced-apart from the second side a first distance and a portion of the first surface in superimposition with the second region being spaced-apart from the second side a second distance, with the second distance being greater than the first distance; and a mold disposed on the first side of the body in superimposition a portion of the first region.
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