发明授权
US08557685B2 Memory cell that includes a carbon-based memory element and methods of forming the same 有权
包含碳基记忆元件的记忆单元及其形成方法

  • 专利标题: Memory cell that includes a carbon-based memory element and methods of forming the same
  • 专利标题(中): 包含碳基记忆元件的记忆单元及其形成方法
  • 申请号: US12536463
    申请日: 2009-08-05
  • 公开(公告)号: US08557685B2
    公开(公告)日: 2013-10-15
  • 发明人: Huiwen Xu
  • 申请人: Huiwen Xu
  • 申请人地址: US CA Milpitas
  • 专利权人: SanDisk 3D LLC
  • 当前专利权人: SanDisk 3D LLC
  • 当前专利权人地址: US CA Milpitas
  • 代理机构: Dugan & Dugan, PC
  • 主分类号: H01L21/20
  • IPC分类号: H01L21/20 H01L47/00
Memory cell that includes a carbon-based memory element and methods of forming the same
摘要:
Memory cells, and methods of forming such memory cells, are provided that include a carbon-based reversible resistivity switching material. In particular embodiments, methods in accordance with this invention form a memory cell by (a) depositing a layer of the carbon material above a substrate; (b) doping the deposited carbon layer with a dopant; (c) depositing a layer of the carbon material over the doped carbon layer; and (d) iteratively repeating steps (b) and (c) to form a stack of doped carbon layers having a desired thickness. Other aspects are also provided.
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