发明授权
- 专利标题: Passivation layer for packaged chip
- 专利标题(中): 封装芯片的钝化层
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申请号: US13313747申请日: 2011-12-07
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公开(公告)号: US08558229B2公开(公告)日: 2013-10-15
- 发明人: Shin-Puu Jeng , Wei-Cheng Wu , Shang-Yun Hou , Chen-Hua Yu , Tzuan-Horng Liu , Tzu-Wei Chiu , Kuo-Ching Hsu
- 申请人: Shin-Puu Jeng , Wei-Cheng Wu , Shang-Yun Hou , Chen-Hua Yu , Tzuan-Horng Liu , Tzu-Wei Chiu , Kuo-Ching Hsu
- 申请人地址: TW
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW
- 代理机构: Lowe Hauptman & Ham, LLP
- 主分类号: H01L23/58
- IPC分类号: H01L23/58
摘要:
The embodiments described above provide mechanisms for forming metal bumps on metal pads with testing pads on a packaged integrated circuit (IC) chip. A passivation layer is formed to cover the testing pads and possibly portions of metal pads. The passivation layer does not cover surfaces away from the testing pad region and the metal pad region. The limited covering of the testing pads and the portions of the metal pads by the passivation layer reduces interface resistance for a UBM layer formed between the metal pads and the metal bumps. Such reduction of interface resistance leads to the reduction of resistance of the metal bumps.
公开/授权文献
- US20130147032A1 PASSIVATION LAYER FOR PACKAGED CHIP 公开/授权日:2013-06-13
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