发明授权
- 专利标题: High-resolution, common-path interferometric imaging systems and methods
- 专利标题(中): 高分辨率,共轨干涉成像系统和方法
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申请号: US12924244申请日: 2010-09-23
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公开(公告)号: US08559014B2公开(公告)日: 2013-10-15
- 发明人: Hwan J. Jeong , David A. Markle
- 申请人: Hwan J. Jeong , David A. Markle
- 代理机构: Opticus IP Law PLLC
- 主分类号: G01B9/02
- IPC分类号: G01B9/02
摘要:
High-resolution, common-path interferometric imaging systems and methods are described, wherein a light source generates and directs light toward a sample from different directions. An optical imaging system collects the resultant scattered and unscattered components. A variable phase shifting system adjusts the relative phase of the components. The interfered components are sensed by an image sensing system. The process is repeated multiple times with different phase shifts to form corresponding multiple electronic signals representative of raw sample images, which are processed by a signal processor to form a processed image. Multiple processed images, each corresponding to a different illumination azimuth angle, are combined to extend the system resolution.
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