发明授权
- 专利标题: Imaging apparatus and imaging method
- 专利标题(中): 成像设备及成像方法
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申请号: US13085199申请日: 2011-04-12
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公开(公告)号: US08559594B2公开(公告)日: 2013-10-15
- 发明人: Chidane Ouchi , Kentaro Nagai
- 申请人: Chidane Ouchi , Kentaro Nagai
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Canon U.S.A., Inc. IP Division
- 优先权: JP2008-278425 20081029; JP2010-091562 20100412
- 主分类号: G03H5/00
- IPC分类号: G03H5/00
摘要:
An imaging apparatus analyzes a periodic pattern of a Moiré due to Talbot interference by the Fourier transform method and forms an image. The imaging apparatus includes a first grating having a structure that transmits light beams from a beam source to refract or diffract the light beams and forms a self image based on a first periodic pattern by the Talbot interference at a predetermined position; a second grating that absorbs part of the first periodic pattern and causes a Moiré to be generated based on a second periodic pattern when the second grating is arranged at a position at which the self image is formed. All cross sections of the Moiré with axes in differential directions of a wavefront for the analysis by the Fourier transform method have a two-dimensional periodic structure in which periods of patterns in the second periodic pattern are the same.
公开/授权文献
- US20110200168A1 IMAGING APPARATUS AND IMAGING METHOD 公开/授权日:2011-08-18
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