发明授权
- 专利标题: Fabry-perot optical sensor and method of manufacturing the same
- 专利标题(中): 法布里珀罗光学传感器及其制造方法
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申请号: US11885457申请日: 2006-03-02
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公开(公告)号: US08559770B2公开(公告)日: 2013-10-15
- 发明人: Denis Donlagic , Edvard Cibula , Éric Pinet
- 申请人: Denis Donlagic , Edvard Cibula , Éric Pinet
- 申请人地址: CA Quebec, Quebec
- 专利权人: FISO Technologies Inc.
- 当前专利权人: FISO Technologies Inc.
- 当前专利权人地址: CA Quebec, Quebec
- 代理机构: Fasken Martineau DuMoulin LLP
- 优先权: SI200500056 20050302
- 国际申请: PCT/CA2006/000304 WO 20060302
- 国际公布: WO2006/092052 WO 20060908
- 主分类号: G02B6/00
- IPC分类号: G02B6/00
摘要:
A Fabry-Perot optical sensor for sensing a parameter such as pressure or the like is provided. The sensor includes a lead optical fiber from the end of which projects a spacer having an end surface curving inwardly. A diaphragm extends across the forward end of the spacer. The diaphragm is flexible in response to the parameter to be measured and defines a forward reflector of the Fabry-Perot cavity within the optical sensor. A method for manufacturing such a sensor is also provided.
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