发明授权
US08561470B2 Apparatus and method for eliminating varying pressure fluctuations in a pressure transducer
有权
用于消除压力传感器中变化的压力波动的装置和方法
- 专利标题: Apparatus and method for eliminating varying pressure fluctuations in a pressure transducer
- 专利标题(中): 用于消除压力传感器中变化的压力波动的装置和方法
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申请号: US13084850申请日: 2011-04-12
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公开(公告)号: US08561470B2公开(公告)日: 2013-10-22
- 发明人: Anthony D. Kurtz , Richard Martin , Robert Gardner , Adam Kane
- 申请人: Richard Martin , Robert Gardner , Adam Kane , Nora Kurtz
- 申请人地址: US NJ Leonia
- 专利权人: Kulite Semiconductor Products, Inc.
- 当前专利权人: Kulite Semiconductor Products, Inc.
- 当前专利权人地址: US NJ Leonia
- 代理机构: Troutman Sanders LLP
- 代理商 James E. Schutz; Jihan A. R. Jenkins
- 主分类号: G01L9/06
- IPC分类号: G01L9/06
摘要:
A single pressure sensing capsule has a reference pressure ported to the rear side of a silicon sensing die. The front side of the silicon sensing die receives a main pressure at another port. The difference between the main and reference pressure results in the sensor providing an differential pressure output. The reference pressure or main pressure may be derived from a pump pressure which is being monitored. The pump pressure output is subjected to a pump ripple or a sinusoidally varying pressure. In order to compensate for pump ripple, a coiled tube or an adjustable dampening chamber comprising a spiral inlet tube and a volume cavity can be used. The tube length is selected to suppress the pump ripple as applied to the sensor die. In this manner, the pump ripple cannot cause resonance which would result in pressure amplification and which pressure amplification would destroy the sensor.