发明授权
US08563361B2 Packaging method of molded wafer level chip scale package (WLCSP)
有权
模制晶圆级芯片级封装(WLCSP)的封装方法
- 专利标题: Packaging method of molded wafer level chip scale package (WLCSP)
- 专利标题(中): 模制晶圆级芯片级封装(WLCSP)的封装方法
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申请号: US13547358申请日: 2012-07-12
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公开(公告)号: US08563361B2公开(公告)日: 2013-10-22
- 发明人: Yan Xun Xue , Hamza Yilmaz , Yueh-Se Ho , Jun Lu , Ping Huang , Lei Shi , Lei Duan , Yuping Gong
- 申请人: Yan Xun Xue , Hamza Yilmaz , Yueh-Se Ho , Jun Lu , Ping Huang , Lei Shi , Lei Duan , Yuping Gong
- 申请人地址: US CA Sunnyvale
- 专利权人: Alpha & Omega Semiconductor, Inc.
- 当前专利权人: Alpha & Omega Semiconductor, Inc.
- 当前专利权人地址: US CA Sunnyvale
- 代理机构: CH Emily LLC
- 代理商 Chein-Hwa Tsao
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A WLCSP method comprises: depositing a metal bump on bonding pads of chips; forming a first packaging layer at front surface of wafer to cover metal bumps while forming an un-covered ring at the edge of wafer to expose the ends of each scribe line located between two adjacent chips; thinning first packaging layer to expose metal bumps; forming a groove on front surface of first packaging layer along each scribe line by cutting along a straight line extended by two ends of scribe line exposed on front surface of un-covered ring; grinding back surface of wafer to form a recessed space and a support ring at the edge of the wafer; depositing a metal layer at bottom surface of wafer in recessed space; cutting off the edge portion of wafer; and separating individual chips from wafer by cutting through first packaging layer, the wafer and metal layer along groove.
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