Invention Grant
- Patent Title: Power device and method for manufacturing the same
- Patent Title (中): 动力装置及其制造方法
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Application No.: US13353990Application Date: 2012-01-19
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Publication No.: US08564022B2Publication Date: 2013-10-22
- Inventor: Jae Hoon Lee
- Applicant: Jae Hoon Lee
- Applicant Address: KR Suwon-Si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-Si
- Agency: McDermott Will & Emery LLP
- Priority: KR10-2011-0066016 20110704
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/66

Abstract:
Provided is a power device. The power device may include a two-dimensional electron gas (2-DEG) layer in a portion corresponding to a gate electrode pattern since a second nitride layer is further formed on a lower portion of the gate electrode pattern after a first nitride layer is formed and thus, may be capable of performing a normally-OFF operation. Accordingly, the power device may adjust generation of the 2-DEG layer based on a voltage of a gate, and may reduce power consumption. The power device may regrow only the portion corresponding to the gate electrode pattern or may etch a portion excluding the portion corresponding to the gate electrode pattern and thus, a recess process may be omissible, a reproducibility of the power device may be secured, and a manufacturing process may be simplified.
Public/Granted literature
- US20130009164A1 POWER DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2013-01-10
Information query
IPC分类: