Invention Grant
US08574361B2 Group-III element nitride crystal producing method and group-III element nitride crystal
有权
III族元素氮化物晶体制造方法和III族元素氮化物晶体
- Patent Title: Group-III element nitride crystal producing method and group-III element nitride crystal
- Patent Title (中): III族元素氮化物晶体制造方法和III族元素氮化物晶体
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Application No.: US12524811Application Date: 2008-03-05
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Publication No.: US08574361B2Publication Date: 2013-11-05
- Inventor: Osamu Yamada , Hisashi Minemoto , Kouichi Hiranaka , Takeshi Hatakeyama , Takatomo Sasaki , Yusuke Mori , Fumio Kawamura , Yasuo Kitaoka
- Applicant: Osamu Yamada , Hisashi Minemoto , Kouichi Hiranaka , Takeshi Hatakeyama , Takatomo Sasaki , Yusuke Mori , Fumio Kawamura , Yasuo Kitaoka
- Applicant Address: JP Tokyo
- Assignee: Ricoh Company, Ltd.
- Current Assignee: Ricoh Company, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Cooper & Dunham LLP
- Priority: JP2007-065845 20070314
- International Application: PCT/JP2008/000444 WO 20080305
- International Announcement: WO2008/111289 WO 20080918
- Main IPC: H01L21/322
- IPC: H01L21/322

Abstract:
A method for producing a high-quality group-III element nitride crystal at a high crystal growth rate, and a group-III element nitride crystal are provided. The method includes the steps of placing a group-III element, an alkali metal, and a seed crystal of group-III element nitride in a crystal growth vessel, pressurizing and heating the crystal growth vessel in an atmosphere of nitrogen-containing gas, and causing the group-III element and nitrogen to react with each other in a melt of the group-III element, the alkali metal and the nitrogen so that a group-III element nitride crystal is grown using the seed crystal as a nucleus. A hydrocarbon having a boiling point higher than the melting point of the alkali metal is added before the pressurization and heating of the crystal growth vessel.
Public/Granted literature
- US20120168695A2 GROUP-III ELEMENT NITRIDE CRYSTAL PRODUCING METHOD AND GROUP-III ELEMENT NITRIDE CRYSTAL Public/Granted day:2012-07-05
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