A robot apparatus includes: an image pickup device; a goal-image storing unit that stores, according to sensitivity represented by an amount of change of a pixel value at the time when a target aligned with a goal position on an image at a pixel level is displaced by a displacement amount at a sub-pixel level, goal image data in a state in which the target is arranged; and a target detecting unit that calculates a coincident evaluation value of the target on the basis of comparison of image data including the target and the goal image data stored by the goal-image storing unit and detects positional deviation of the target with respect to the goal position on the basis of the coincidence evaluation value.